Micrometer Precision of Miniature Pattern with a Shape Memory Alloy Stage.

EasyChair Preprint 9403

Abstract

In most cases, the stage with piezoelectric actuators, in particular the SAM stage, represents an interesting alternative to the classic manual stage. Because it has the advantages of high precision, a significant possibility of miniaturization, and above all the simplicity and ease of development of these contactless sensors. This article demonstrates that, with proper design, we can make and develop a SAM stage able to track and manipulate a high-precision coded pattern. This pattern is used to measure and track the movement of a miniature target placed below a vision system (optical microscope and camera). This technique is particularly interesting when a contactless sensor is necessary, and especially to avoid the disturbance of miniatures targets that have a high sensitivity to external excitations.

Keyphrases: Command, Joule effect, Peltier effect, SAM stage, Subpexilic, coded pattern

@booklet{EasyChair:9403,
  author    = {Bouali Hichem and Belkacemi Yacine and Bouaziz Mohamed and Fellah Mamoun},
  title     = {Micrometer Precision of Miniature Pattern with a Shape Memory Alloy Stage.},
  howpublished = {EasyChair Preprint 9403},
  year      = {EasyChair, 2022}}